半导体硅片工艺中有一个是 RCA cleaning 是什么意思?

半导体硅片工艺中有一个是 RCA cleaning 是什么意思?,第1张

RCA cleaning 就是采用RCA方法来清洗的意思。RCA是一种典型的、普遍使用的湿式化学清洗法,该清洗法主要包括以下几种清洗液: (1)SPM:H2SO4 /H2O2 120~150℃ SPM具有很高的氧化能力,可将金属氧化后溶于清洗液中,并能把有机物氧化生成CO 2和H2O。用SPM清洗硅片可去除硅片表面的重有机沾污和部分金属,但是当有机物沾污特别严重时会使有机物碳化而难以去除。 (2)HF(DHF):HF(DHF) 20~25℃ DHF可以去除硅片表面的自然氧化膜,因此,附着在自然氧化膜上的金属将被溶解到清洗液中,同时DHF抑制了氧化膜的形成。因此可以很容易地去除硅片表面的Al,Fe,Zn,Ni等金属,DHF也可以去除附着在自然氧化膜上的金属氢氧化物。用DHF清洗时,在自然氧化膜被腐蚀掉时,硅片表面的硅几乎不被腐蚀。 (3)APM (SC-1):NH4OH/H2O2 /H2O 30~80℃ 由于H2O2的作用,硅片表面有一层自然氧化膜(SiO2),呈亲水性,硅片表面和粒子之间可被清洗液浸透。由于硅片表面的自然氧化层与硅片表面的Si被NH 4OH腐蚀,因此附着在硅片表面的颗粒便落入清洗液中,从而达到去除粒子的目的。在 NH4OH腐蚀硅片表面的同时,H2O 2又在氧化硅片表面形成新的氧化膜。 (4)HPM (SC-2):HCl/H2O2/H2 O 65~85℃ 用于去除硅片表面的钠、铁、镁等金属沾污。在室温下HPM就能除去Fe和Zn。 清洗的一般思路是首先去除硅片表面的有机沾污,因为有机物会遮盖部分硅片表面,从而使氧化膜和与之相关的沾污难以去除;然后溶解氧化膜,因为氧化层是“沾污陷阱”,也会引入外延缺陷;最后再去除颗粒、金属等沾污,同时使硅片表面钝化。

One, company nature

The Beijing Hualin cause company full title for the Beijing Hualin great industry galvanization equipment limited company (industry and commerce registration), is a stock-company type enterprise, the registration time is on June 25, 2001, the registration capital in cash is 500,000 Renminbi, fixes property to achieve more than 2 million Renminbi at this point. The company produces the sales electrogilding production line by the scale, galvanizes the equipment, the three wastes handling equipment, the environmental protection equipment and so on primarily. Additionally builds the production sale semiconductor decontaminatin unit project from 2002, foreign continued all correlations service take the Beijing Hualin cause electronic installation limited company, the company all finance conditions and the skeleton still by the Hualin great industry galvanization equipment limited company as the main body, therefore was called the Beijing Hualin cause company.

Two, in company scale and frame

The Hualin cause company area more than 7,000 square meters, have more than 2,200 square meters productions workshops, the staff achieved 60 people, are the small and medium-sized enterprises. In the company the team average age is 32 years old, is fills the vitality and the vigor young troop. The main department is: General manager room (3 people), finance department (3 people), engineering design department (11 people), production department (40 people), market sale promotion department (3 people), post-sale service department (5 people).

Three, the company is employed the scope

The Hualin cause company is the production configuration enterprise, mainly produces the project is three bulks.

Semiconductor equipment (clean craft primarily):

1, the quartz tube clearer (lies, vertical, completely automatic, semiautomatic, manual)

2, chip clearer ()

3, silicon chip clearer ()

4, the quartz tube acid soaks the clearer ()

5, silicon chip corrosion machine ()

6, wet Taiwan.

7, blue, work clothes clearer ()

8, developing machine.

9, the principle (installs) the piece machine.

10, trillion sound wave clearer

11, ventilation chamber

12, nitrogen storage machine

13, silicon chip

Galvanizes the equipment:

1, plates respectively plants the specification computer control completely automatic galvanization production line

2, galvanization factory entire factory equipment

3, the negative pole and the anode electricity swims paints the production line

4, aluminum oxidation production line

5, each kind of specification rolls plates the production line and rolls plating machine

6, chemical plating production line

7, various varieties, the specification plates the trough

8, three wastes handling equipment

Engineering plastics design and processing:

1, domestically produced PVC, UPVC, PP, plate processing and so on PE (for import welding apparatus and material)

2, Germany imports PP, PVDF, PVC, CPVC (for import welding apparatus and material)

3, import engineering plastics plate, good material, tubing, molding proxy sale.

Four, company productivity

The Hualin cause company by galvanizes the equipment and the semiconductor equipment production primarily.

The galvanization equipment annual production reaches (03 year from May to 04 years May) 3.9 million Renminbi, the design production galvanization line is contains completely automatic line 4, the waste water processing system three sets, the entire factory galvanization equipment designs a set (in design), the copper extract stirs the system three sets (to export Zambia).

Semiconductor equipment production value(03 year from May to 04 years in May) 570万万 the multi- Renminbi, the design and produces quartz tube clearer 27 (to contain two completely automatics), silicon chip clearer 29 (contain four completely automatics), wet Taiwan five, blue clearer, silicon chip corrosion machine two, manage piece machine two (in manufacture).

The synthesis productivity estimated for galvanizes the equipment ten sets, semiconductor decontaminatin unit 150, output value 12 million.

Five, company market feedback

The product quality achieved the measure unit to be used standard, antirevisionism rate is 7%,

Production cycle short, excellent in quality, the price justice, the post-sale safeguard is good is the customer appraisal.

Six, company intelligence

The Beijing Hualin cause limited company is the Beijing galvanization association members.

The Beijing Hualin cause limited company is the Chinese semiconductor profession association members.

Seven, the company and the similar company compare

The Hualin cause company earlier period take galvanizes the equipment production and the semiconductor equipment downriver part production enterprise, the development as the independent research and development, the design, the production, processes a body the production configuration enterprise, has been through repeatedly four years, nimble is mobile, fast adapts the market, grasps the quotation tendency, grasps the customer demand, is the human takes charge of the fast development the essential condition. At the same time, production cycle short, quality qualified, the price justice, the post-sale safeguard is good is wins in its enterprise solid foundation. Distinguishes thoroughly between similar state-owned enterprise's extremely fat, dilatory, not the practical attitude, in the cost control, the personnel mixes and so on the aspect has the obvious difference.

Eight, company enterprise idea

Humanist, the technical innovation, the service customer, the pursue is remarkable

Nine, company enterprise objective

Take the standardization, the rationalization, the standardization, efficiency, as a criterion, provides the high quality product and the thorough service.


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